An annealing furnace is a process used in semiconductor device fabrication that involves heating multiple semiconductor wafers to affect their electrical properties. Heat treatments are designed for different effects. The wafer can be heated to activate dopants, convert thin films to thin films or to wafer substrate interfaces, densify deposited thin films, change the state of growing thin films, repair implanted damage, move dopants or transfer dopants The agent is transferred from one film to another or from the film into the wafer substrate.
Can be integrated into other furnace processing steps, such as oxidation, or can be processed by itself. The annealing furnace is completed by equipment specially designed for heating semiconductor wafers. The annealing furnace is an energy-saving periodic operation furnace with a super energy-saving structure and a fiber structure, which saves 60% of electricity.
The frame of the annealing furnace is welded by various types of steel. The outer frame is made of channel steel as the main beam, the coaming plate is made of cold sheet, the trolley is made of channel steel as the main beam, and the bottom plate and the front and rear plates are made of middle plate. Transmission part: The trolley transmission adopts a motor and a reducer to drive a set of driving wheels at the front end through a chain. The furnace door drive adopts a combination of a worm gear reducer and a motor to lift it electrically.
Sealing: The sealing between the trolley and the furnace body adopts a labyrinth structure, and there are automatic sand sealing knife sealing devices on both sides of the trolley. The furnace door is sealed by rolling channel pressing and spring pressing automatic mechanism. The furnace body part adopts high-quality refractory brick structure to ensure the tightness of the furnace. The pressure-resistant part of the trolley is built with high-alumina bricks, and thermal insulation bricks are added to the lower part.
Combustion system: Several burners are installed on both sides of the oil furnace, and the heat flow reciprocates in the furnace to ensure the uniformity of furnace temperature. Automatic and semi-automatic types can be selected as required.
Smoke exhaust preheating device: a smoke exhaust preheating device is installed at the upper end of the rear of the furnace. When the flue gas in the furnace passes through the preheater, it is sent to the cold air by the fan for preheating, and then sent to the burner by the pipeline for combustion support. A manual butterfly valve is installed at the outlet, which can adjust the pressure in the furnace. It is widely used in heating, cooling, condensation, evaporation and other processes in chemical, petroleum, food, metallurgy, machinery, light industry, electric power, shipbuilding, papermaking, mining, medicine, central heating and other industrial sectors.
The annealing furnaces are classified according to heat sources, including electric heating furnaces, coal-fired annealing furnaces, oil-fired annealing furnaces, natural gas annealing furnaces, gas annealing furnaces, etc. Among them, gas annealing furnaces produced by self-provided gas generators are the most widely used. The gas annealing kiln minus the combustion chamber, directly uses the gas burner to spray and burn in the heating chamber. In order to reduce energy consumption, gas annealing kilns are often equipped with a heat exchange system, which converts air into combustion-supporting hot air for combustion-supporting gas.
